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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08
filingDate 2002-07-09^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2004-05-04^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2db005a8bce1245fe96ab79819c80f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcab11009551458cad000e79410483ce
publicationDate 2004-05-04^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6730802-B2
titleOfInvention Silicon carbide precursor
abstract The compound 2,4,6-trimethyl-2,4,6-trisila heptane, the preparation thereof, and the use thereof as a silicon carbide precursor in chemical vapor deposition and infiltration procedures are disclosed.
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