Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf5eafa2bfc20f349c606cd4b21e643c |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-548 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-204 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-056 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-075 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
filingDate |
2001-08-16^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2006-10-17^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dcf325e86accdac26906cfe3529694e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_929ae0e8227f0706614c5835698eba1f |
publicationDate |
2006-10-17^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7122736-B2 |
titleOfInvention |
Method and apparatus for fabricating a thin-film solar cell utilizing a hot wire chemical vapor deposition technique |
abstract |
A thin-film solar cell is provided. The thin-film solar cell comprises an a-SiGe:H (1.6 eV) n-i-p solar cell having a deposition rate of at least ten (10) Å/second for the a-SiGe:H intrinsic layer by hot wire chemical vapor deposition. A method for fabricating a thin film solar cell is also provided. The method comprises depositing a n-i-p layer at a deposition rate of at least ten (10) Å/second for the a-SiGe:H intrinsic layer. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8901695-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008261347-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011100955-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8334017-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8043885-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011120537-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9634164-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8735210-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013224899-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9214577-B2 |
priorityDate |
2001-08-16^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |