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level 11^^<http://www.w3.org/2001/XMLSchema#integer>
symbol H01L31/204
modified 2013-01-01^^<http://www.w3.org/2001/XMLSchema#date>
title Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic System including AIVBIValloys, e.g. SiGe, SiC
type http://data.epo.org/linked-data/def/cpc/SubGroup
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