| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate |
2002-05-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-11-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc74b1c6ffffe579537706a5acd07689 |
| publicationDate |
2006-11-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7135423-B2 |
| titleOfInvention |
Methods for forming low resistivity, ultrashallow junctions with low damage |
| abstract |
Methods for forming ultrashallow junctions in semiconductor wafers include introducing into a shallow surface layer of a semiconductor wafer a dopant material that is selected to form charge carrier complexes which produce at least two charge carriers per complex, and short-time thermal processing of the doped surface layer to form the charge carrier complexes. The short-time thermal processing step may be implemented as flash rapid thermal processing of the doped surface layer, sub-melt laser processing of the doped surface layer, or RF or microwave annealing of the doped surface layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8679863-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9498845-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007190759-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11040415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7348264-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7795119-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8503497-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009120924-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009020757-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007166846-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011008952-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7407874-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435872-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008318399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010297856-A1 |
| priorityDate |
2002-05-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |