| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84 |
| filingDate |
2005-10-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-03-25^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3224c3bdfc81965402ef4cd0048c1847 |
| publicationDate |
2008-03-25^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7348225-B2 |
| titleOfInvention |
Structure and method of fabricating FINFET with buried channel |
| abstract |
A method of manufacturing a fin structure comprises forming a first structure of a first material type on a wafer and forming a buried channel of a second material adjacent sidewalls of the first structure. The second material type is different than the first material type. The structure includes a first structure and a buried channel. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7979836-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010317167-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017170335-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9484201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009283829-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9620633-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8513073-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9496371-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010041191-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10374042-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8772149-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010038694-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8232168-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781283-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10109748-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008206934-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9673198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8184472-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9171954-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269970-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8932949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7772048-B2 |
| priorityDate |
2005-10-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |