| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-946
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-942 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 |
| filingDate |
2005-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-05-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c18c99e93bc0cbadee1ada362a8ca95a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5564e8d01979ed387d4d79ee701eac9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1570e4e844d0e9f312564180ab2b6f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55f6349a82ca9821e937abb8a7b3161a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68ab49e69b9f5e943cfba0e9b821ea15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bc97156d129ef8d162295685de397bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2be734542efc8882de16ea66b76b33ff |
| publicationDate |
2009-05-26^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7538036-B2 |
| titleOfInvention |
Methods of forming openings, and methods of forming container capacitors |
| abstract |
A patterned mask can be formed as follows. A first patterned photoresist is formed over a masking layer and utilized during a first etch into the masking layer. The first etch extends to a depth in the masking layer that is less than entirely through the masking layer. A second patterned photoresist is subsequently formed over the masking layer and utilized during a second etch into the masking layer. The combined first and second etches form openings extending entirely through the masking layer and thus form the masking layer into the patterned mask. The patterned mask can be utilized to form a pattern in a substrate underlying the mask. The pattern formed in the substrate can correspond to an array of capacitor container openings. Capacitor structure can be formed within the openings. The capacitor structures can be incorporated within a DRAM array. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10888721-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224798-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7919386-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010261331-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010151653-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7759193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8946043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8388851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076757-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076680-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009209080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8652926-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8518788-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9595387-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7902081-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9196673-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008090416-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8163613-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10515801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010048403-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8760841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009176011-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7858486-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8129240-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010311219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8734656-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8450164-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7825451-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8263457-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435876-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009512-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008206950-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7785962-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8274777-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010266962-A1 |
| priorityDate |
2004-02-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |