| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_95ae9d2bbf6e59d566702559f6e25c4b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-954 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469 |
| filingDate |
2007-09-26^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-03-02^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02f4d57a506827efd0be822eb48a9d30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b3d0f3d05ca43898ecd1091c80a567b |
| publicationDate |
2010-03-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7670963-B2 |
| titleOfInvention |
Single-wafer process for fabricating a nonvolatile charge trap memory device |
| abstract |
A method for fabricating a nonvolatile charge trap memory device is described. The method includes first forming a tunnel dielectric layer on a substrate in a first process chamber of a single-wafer cluster tool. A charge-trapping layer is then formed on the tunnel dielectric layer in a second process chamber of the single-wafer cluster tool. A top dielectric layer is then formed on the charge-trapping layer in the second or in a third process chamber of the single-wafer cluster tool. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10896973-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9997641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8860122-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009152621-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304968-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8633537-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10374067-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10699901-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9431549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10615289-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9331184-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9306025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784243-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11222965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9929240-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9355849-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056565-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10446656-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8076250-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8643124-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8940645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11721733-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312336-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8685813-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10903342-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10903068-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9508734-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11456365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015187960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593812-B2 |
| priorityDate |
2007-05-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |