| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_738b90cbcfe3be88e97ea895f2e0912a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80cae194c8616917496c0b9da1ebc32e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43d6be8f043c8f11abe77a3961ca0d19 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-26 |
| filingDate |
2012-08-01^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-06-10^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b671369393e2eda34d91d2d3b43b1600
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71cdb7fcce659d79074e7047bb80ba7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39cbc1e2eb2f989e3babe7cb02a1fe5d |
| publicationDate |
2014-06-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8748063-B2 |
| titleOfInvention |
Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks |
| abstract |
Methods and structures for extreme ultraviolet (EUV) lithography are disclosed. A method includes determining a phase error correction for a defect in an EUV mask, determining an amplitude error correction for the EUV mask based on both the defect in the EUV mask and the phase error correction, and modifying the EUV mask with the determined phase error correction and the determined amplitude error correction. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104252098-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014254915-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013336574-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015117754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10824080-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9261775-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104252098-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8953869-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9679372-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109031894-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020133141-A1 |
| priorityDate |
2012-08-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |