| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14636 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N25-617
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N25-745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 |
| filingDate |
2014-05-08^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-05-24^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cbb7c38bc4b7ed0d3079f0b8745caaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d0a276fbd7d65f6f258d07dd13f6362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af9bcd4fcca3d996b4d708a23c010a99 |
| publicationDate |
2016-05-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9347890-B2 |
| titleOfInvention |
Low-noise sensor and an inspection system using a low-noise sensor |
| abstract |
A method of inspecting a sample at high speed includes directing and focusing radiation onto a sample, and receiving radiation from the sample and directing received radiation to an image sensor. Notably, the method includes driving the image sensor with predetermined signals. The predetermined signals minimize a settling time of an output signal of the image sensor. The predetermined signals are controlled by a phase accumulator, which is used to select look-up values. The driving can further include loading an initial phase value, selecting most significant bits of the phase accumulator, and converting the look-up values to an analog signal. In one embodiment, for each cycle of a phase clock, a phase increment can be added to the phase accumulator. The driving can be performed by a custom waveform generator. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10234771-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10816906-B2 |
| priorityDate |
2013-12-19^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |