http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9721750-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da1568abf4abdfb458e0e2b839d41d40 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-028 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 2015-07-28^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-08-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29b712b48ae3f31ea6bd8a9b0e04bbd5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_149f4f2f23d9c3b783ab68e71ad3fe7a |
| publicationDate | 2017-08-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9721750-B2 |
| titleOfInvention | Controlling contamination particle trajectory from a beam-line electrostatic element |
| abstract | Provided herein are approaches for controlling particle trajectory from a beam-line electrostatic element. In an exemplary approach, a beam-line electrostatic element is disposed along a beam-line of an electrostatic filter (EF), and a voltage is supplied to the beam-line electrostatic element to generate an electrostatic field surrounding the beam-line electrostatic element, agitating a layer of contamination particles formed on the beam-line electrostatic element. A trajectory of a set of particles from the layer of contamination particles is then modified to direct the set of particles to a desired location within the EF. In one approach, the trajectory is controlled by providing an additional electrode adjacent the beam-line electrostatic element, and supplying a voltage to the additional electrode to control a local electrostatic field in proximity to the beam-line electrostatic element. In another approach, the trajectory is influenced by one or more geometric features of the beam-line electrostatic element. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019198283-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468224-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021090845-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D956005-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021020399-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11011343-B2 |
| priorityDate | 2015-07-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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