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publicationNumber US-9812587-B2
titleOfInvention Semiconductor device and manufacturing method thereof
abstract A miniaturized transistor is provided. A transistor with low parasitic capacitance is provided. A transistor with high frequency characteristics is provided. A semiconductor device including the transistor is provided. A miniaturized semiconductor device includes an oxide semiconductor, the first conductor, the second conductor, the third conductor, the first insulator, and the second insulator. The first conductor is embedded in a region between the second conductor and the third conductor with the first insulator positioned between the first conductor and the region.
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