patent/US-7402506-B2

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7402506-B2

Outgoing Links

Predicate	Object
filingDate	2005-06-16^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2008-07-22^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2008-07-22^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-7402506-B2
titleOfInvention	Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
abstract	A thin film transistor comprises a zinc-oxide-containing semiconductor material. Such transistors can further comprise spaced apart first and second contact means or electrodes in contact with said material. Further disclosed is a process for fabricating a thin film transistor device, wherein the substrate temperature is no more than 300° C. during fabrication.
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