http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9869012-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-1393
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-1317
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32559
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D43-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0015
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D43-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
filingDate 2017-01-23^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-01-16^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ccf8de3d565306eaf12e7c65d0dddc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a3cbff347b5ce36e8992af6be3ee2ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d167afee76b4996967cea5c2061c50b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9da225554df0144657bbe981e528c192
publicationDate 2018-01-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9869012-B2
titleOfInvention Ion assisted deposition for rare-earth oxide based coatings
abstract A method of manufacturing an article comprises performing ion assisted deposition (IAD) to deposit a protective layer on at least one surface of the article, wherein the protective layer is a plasma resistant rare earth oxide film having a thickness of less than 300 μm and an average surface roughness of 10 micro-inches or less.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10563297-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521830-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018080116-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10544500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11017984-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11661650-B2
priorityDate 2013-07-20^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9034199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7838083-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8110043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015270108-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8206829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014031533-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013288037-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005181566-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002043666-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583369-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014349073-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013155220-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011129684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012033326-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012154916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008268171-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008115725-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011086178-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010028572-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006096704-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015218057-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005037193-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014377504-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005284770-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015275375-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013273313-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013224498-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013273327-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009214825-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012104703-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008237029-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7696117-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011315081-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014037969-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005164513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5415756-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013284373-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006110609-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008142755-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6949203-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015024155-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004191545-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007191794-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015299050-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3796182-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7479464-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015153123-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012125488-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7278911-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9090046-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013071685-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013048606-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009036292-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7422516-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010160143-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016042924-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8758858-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014177123-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012196139-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008261800-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015021324-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012034469-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8941969-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4695439-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6326076-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6962524-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014154465-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7672110-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008264564-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012144640-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003024807-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008264565-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015275361-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008009417-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008108225-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101108692-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012183790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011135915-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5837058-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014197203-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7351482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8367227-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015009745-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003134134-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007047170-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003164354-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010119843-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013156958-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003047464-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007138288-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070013118-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013216783-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003029563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012074514-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030025007-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6884514-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006051602-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8034734-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011198034-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008213496-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010129670-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0200968-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014363596-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013333592-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007111030-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012237745-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5123419
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159373
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1969
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519656
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426017017
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID330167
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID330167
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4124403
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448788371
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159425
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448205702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123105
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451794941
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159427

Showing number of triples: 1 to 192 of 192.