http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017043139-A1

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publicationDate 2017-03-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017043139-A1
titleOfInvention Polishing liquid, polishing liquid set, and substrate polishing method
abstract Provided is a polishing liquid comprising a liquid vehicle, abrasive grains, and a polymer. The polymer has a first molecular chain where functional groups are directly bonded and a second molecular chain branched from the first molecular chain. The functional groups are at least one selected from the group consisting of carboxyl, carboxylate, hydroxyl, sulfo, and sulfonate groups.
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