http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9819827-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063303b1f96ac1a50a63c6049fb0b09f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0475 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate | 1997-11-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d2aa6006009c08b5f2dfc7b5684f41a |
| publicationDate | 1998-05-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-9819827-A1 |
| titleOfInvention | Wet etch for silicon carbide |
| abstract | The present invention provides for a wet etch (10) and method for preparing a semiconductor device structure (22) from a silicon carbide wafer. A first embodiment of the wet etch comprises a vessel (12), a tetrahydrofurfuryl alcohol and potassium nitrite etching solution (14) within the vessel (12), an electrode (20), a wafer support (16) for positioning at least a portion of the silicon carbide wafer (22) within the etching solution (14), and a voltage source (21) coupled with the electrode (20) and the wafer support (16). A second embodiment of the wet etch (10) comprises a wafer carrier (32) for holding at least one wafer (22), a polishing plate (36) adjacent the wafer carrier (32), a voltage source (21) having a first terminal electrically coupled with the wafer (22) and a second terminal electrically coupled with the polishing plate (36), and an applicator (40) adjacent the polishing plate (36) for depositing an etching solution (14) on a surface of the polishing plate (36). |
| priorityDate | 1996-11-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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