http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104842259-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B55-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B55-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-14 |
| filingDate | 2010-12-28^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-01-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-01-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104842259-B |
| titleOfInvention | Substrate polishing equipment, substrate polishing method and in the polissoir be used for adjust polishing pad burnishing surface temperature equipment |
| abstract | Provide a kind of equipment for polishing substrate.The equipment includes：Support the rotatable polishing block of polishing pad；It is configured to keep on the burnishing surface of substrate and the polishing pad that substrate is pressed against on the rotation polishing block so as to polish the substrate holder of substrate；It is configured to determine the pad temperature detector of the burnishing surface temperature of polishing pad；It is configured to contact the burnishing surface of polishing pad so as to adjusting the pad thermoregulator of burnishing surface temperature；And it is configured to control the pad thermoregulator to control the temperature controller of burnishing surface temperature by the burnishing surface temperature information detected based on the pad temperature detector. |
| priorityDate | 2009-12-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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