| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 |
| filingDate |
2004-11-22^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9023a1d1f32436b94d2870cb2109e5aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b97050e15f65cbf8158932b4c497be32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03bfdacc7b985ffae305a10f42aa6188 |
| publicationDate |
2005-07-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005202363-A |
| titleOfInvention |
Photosensitive composition remover |
| abstract |
PROBLEM TO BE SOLVED: To remove an uncured photosensitive composition film adhering to a peripheral part, an edge part or a back part of a substrate in a step of forming a photosensitive composition film on a glass substrate, a semiconductor wafer or the like, or an apparatus member or an instrument The removal liquid effective in the removal of the uncured photosensitive composition adhering to the surface is provided. A removing liquid used for removing an uncured photosensitive composition, which contains 1 to 80% by mass of at least one aromatic hydrocarbon having 9 or more carbon atoms. . The photosensitive composition removing liquid further contains an aprotic polar solvent and / or another solvent other than the aprotic polar solvent. The photosensitive composition removing liquid is particularly preferably used for removing a photosensitive composition containing a pigment. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070064248-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007002101-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015096590-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100830063-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4668016-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010231223-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007072357-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021193577-A1 |
| priorityDate |
2003-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |