| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-76 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-70 |
| filingDate |
2014-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f95518efeca25e7b8139c34643fd058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b310d9c373c1dae2180f31fa4c20573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88b428aa2de08028795797ee9a5c719e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eafd21dd1b4c044f28def36abac0f20d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49543eb2462cbeec323b801f318fa576
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59f76d8a94f5fe3fea48f3650bed05b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e824c33a3257a5fdc3214ca6486325a6 |
| publicationDate |
2014-09-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201435481-A |
| titleOfInvention |
Reflective mask and integrated circuit manufacturing method |
| abstract |
The invention discloses a reflective reticle comprising a substrate. A multilayer reflective structure is formed on the substrate. A cap layer is formed on the multilayer reflective structure and has a hardness greater than 8. An absorbing layer is formed on the cap layer and has a pattern of integrated circuit wiring. The invention also discloses a method of manufacturing an integrated circuit. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276662-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9529250-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I587072-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10747097-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10031409-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11073755-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11145719-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9766536-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I710004-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I572973-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10553428-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I603142-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11270884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10168611-B2 |
| priorityDate |
2013-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |