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filingDate 2016-03-25^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-06-18^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2cbaa9fef0bd8ec66e14cb425cfb01
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publicationDate 2019-06-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-10324374-B2
titleOfInvention Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, mask blank provided with active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, electronic device and novel compound
abstract There is provided an active light sensitive or radiation sensitive resin composition which contains (A) an alkali soluble resin and (C) a cross-linking agent represented by the following General Formula (1-0).
priorityDate 2013-09-30^^<http://www.w3.org/2001/XMLSchema#date>
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