http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-20
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-20 |
| level | 8^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | G03F1/20 |
| modified | 2013-01-01^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00 |
Incoming Links
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