| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2018-12-14^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-11-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e28d934bc1bf4b9bde141f1c72eee9fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d77141942773d7111cd6a6c9bd6f46df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbaab80d113dc8ee1dcf0e06c2ee26cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0af87f7f14f76735a6cd8f4c4a79a267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4699ade218e0560a1d1eb8893e8c9924 |
| publicationDate |
2021-11-30^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11187981-B2 |
| titleOfInvention |
Resist composition and method of forming resist pattern |
| abstract |
A resist composition including a resin component whose solubility in a developing solution is changed due to an action of an acid, in which the resin composition has a constitutional unit derived from a compound containing a chain-like aliphatic acid dissociable group or a monocyclic aliphatic acid dissociable group and a constitutional unit derived from a compound containing an aromatic hydrocarbon group-containing acid dissociable group. |
| priorityDate |
2017-12-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |