| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2002-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-01-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d7dfeaee70997d05885a256001e668c |
| publicationDate |
2004-01-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6682575-B2 |
| titleOfInvention |
Methanol-containing silica-based CMP compositions |
| abstract |
The invention provides a polishing composition comprising (a) a silica abrasive, (b) methanol, and (c) a liquid carrier, wherein the polishing composition has a pH of about 1 to about 6, and the polishing composition is colloidally stable. The invention also provides a method for polishing a substrate comprising a silicon-based dielectric layer using the polishing composition. The invention further provides a method of stabilizing a silica abrasive in a polishing composition by contacting the abrasive with methanol. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7677956-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005150173-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008153292-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7998866-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005112892-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003211815-A1 |
| priorityDate |
2002-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |