| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2008-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-08-16^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_851c6c8ab8ac08f4564bfc47ed734574
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c3c1c080881a1104494e6ba22fad68a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3cc8c0232af7d6fba1fdf32fdc906a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b9163e19868efe900c3d5c094185379 |
| publicationDate |
2011-08-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7998866-B2 |
| titleOfInvention |
Silicon carbide polishing method utilizing water-soluble oxidizers |
| abstract |
The inventive method comprises chemically-mechanically polishing a substrate comprising at least one layer of silicon carbide with a polishing composition comprising a liquid carrier, an abrasive, and an oxidizing agent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010279506-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102016122199-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9944829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9129901-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8247328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9318339-B2 |
| priorityDate |
2006-09-05^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |