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publicationDate 2016-02-09^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9256125-B2
titleOfInvention Acid generators and photoresists comprising same
abstract Acid generator compounds are provided that comprise an oxo-1,3-dioxolane moiety and/or an oxo-1,3-dioxane moiety. The acid generators are particularly useful as a photoresist composition component.
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