Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9e9d41b9ec1beb5c86609b3e3663e393 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7b98889d2042dbd2befe49da33d1187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad41e021535ff6a6399af5abdbbfa871 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_50311cab14c8e00e0d2220ff953d68a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd17594235549e1713854e533a23a920 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2005-106 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L35-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N10-817 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-16 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-10 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-12 |
filingDate |
2011-04-26^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2017-09-12^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df0e99381eb2d71b9f9541b2a54fcdc3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eec433f408331f6d113bb13c89798146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86bcbecf5f677e9831565e222244e4c2 |
publicationDate |
2017-09-12^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9759613-B2 |
titleOfInvention |
Temperature sensor device and radiation thermometer using this device, production method of temperature sensor device, multi-layered thin film thermopile using photo-resist film and radiation thermometer using this thermopile, and production method of multi-layered thin film thermopile |
abstract |
Disclosed are a temperature sensor device using a thermopile, the total number n of thermocouples thereon can be increased without greatly increasing the internal resistance of the thermopile r, providing high output level and high S/N ratio, a highly sensitive radiation thermometer using the device, and production method of the device using organic material for thin films to form the thermopile. These provide a standardized inexpensive multi-layered thin film thermopile, a radiation thermometer with high sensitivity, and production method of these devices. The temperature sensor device is a device wherein a thermopile which is formed on a thin film thermally isolated from a substrate is place in a temperature sensing part, and the thin film is formed as a multi-layered thin film, a layered thermopile is formed on each layered thin film, the substrate functioning as a heat sink which is one junction of the reference temperature of the thermopile. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017363477-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10803886-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9880058-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015168220-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10502631-B2 |
priorityDate |
2010-04-26^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |